The unique advantages of surface and volume processing enabled by femtosecond laser fabrication makes it one of the most powerful tools for manufacturing optical and photonic devices based on complex three-dimensional structures with diverse functions. In this review, we focus on the recent advancements of femtosecond laser fabrication technologies and their versatile applications in different fields (e.g., nanotechnology, soft robotics, optics, and optoelectronics). Herein, the characteristics and development of laser direct writing, spatial light modulator-based fabrication and interference-based approaches are reviewed. Furthermore, typical applications and approaches related to the manufacturing of cutting-edge optical devices including microlens arrays, micro/nano gratings, photonic crystals, and optical fibers are summarized. Finally, the current challenges and emerging trends of this technology are discussed.

This study is published in Optics and Laser Technology 135(2021):1-11.